SEM Images Obtained with an Energy and Takeoff Angle Selective Detector

SEM Image Observation Using an Electron Energy and Electron Take-off Angle Filtered Detector

Scanning electron microscopes (SEMs) are usually equipped with two types of detectors: secondary and backscattered electron detectors. The former produces secondary electron images (SEI) rich in topographic information[1, 2], whereas the latter produces backscattered electron images (BEI) rich in composition information[3]. Recently, however, a few other detectors have been installed in additio...

Automated Interpretation of SEM Images

An important part of quality control in the fabrication of integrated circuit wafers involves making three-dimen sional measurements of the wafer’s surface topography. We describe a method for obtaining a dense depth map of the wafer surface from a single Scanning Electron Microscope (SEM) image. The depth map gives a complete description of the surface topography, allowing the easy calculation...

Surface Reconstruction From AFM and SEM Images

Evaluation of the quality of CT-like images obtained using a commercial flat panel detector system

PURPOSE The development of flat panel detector technology has resulted in renewed interest in the possibility of generating CT-like images from rotational angiographic acquisitions. At least two commercial products now use cone beam reconstruction software in conjunction with flat panel detectors to produce such images. The purpose of the work presented here is to report on image quality obtain...

Limitations of Airway Dimension Measurement on Images Obtained Using Multi-Detector Row Computed Tomography

OBJECTIVES (a) To assess the effects of computed tomography (CT) scanners, scanning conditions, airway size, and phantom composition on airway dimension measurement and (b) to investigate the limitations of accurate quantitative assessment of small airways using CT images. METHODS An airway phantom, which was constructed using various types of material and with various tube sizes, was scanned...